Distributed Bragg grating integrated-optical filters: Synthesis and fabrication
نویسندگان
چکیده
The design, fabrication, and measurement of planar, passive Bragg grating-based transmission filters is presented. We combine interferometric lithography, spatial-phase-locked electron-beam lithography, x-ray nanolithography, and optical lithography with silica-on-silicon waveguiding substrates to define rib waveguides and grating patterns that have multiple quarter-wave shifts along the grating length. Transmission filters such as Gaussian, Butterworth, and Chebyshev can be designed and fabricated with these technologies. © 1995 American Vacuum Society.
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